US Patent Issued to SAMSUNG ELECTRONICS on July 22 for "RF generating device and semiconductor manufacturing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,368,022, issued on July 22, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"RF generating device and semiconductor manufacturing apparatus including the same" was invented by Sungyong Lim (Suwon-si, South Korea), Sungyeol Kim (Suwon-si, South Korea), Yongwon Cho (Suwon-si, South Korea), Younghwan Choi (Suwon-si, South Korea), Chunyoon Park (Suwon-si, South Korea), Seungbo Shim (Suwon-si, South Korea), Hyungjung Yong (Suwon-si, South Korea) and Jaejoong Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A radio frequency (RF) generating device for generating RF output signals is provided. The RF generating de...