US Patent Issued to SAMSUNG ELECTRONICS on July 15 for "Method of manufacturing semiconductor device using stationary laser module" (South Korean Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,204, issued on July 15, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Method of manufacturing semiconductor device using stationary laser module" was invented by Ji Hoon Cha (Seoul, South Korea), Jinwoo Lee (Yongin-si, South Korea), Seok Hoon Kim (Seongnam-si, South Korea), In Gi Kim (Hwaseong-si, South Korea), Seung Min Shin (Daejeon, South Korea) and Yong Jun Choi (Gwacheon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus is provided. The apparatus includes a spinner configured to hold a wafer, a nozzle configured to supply a liquid chemical onto an upper surface of the wafer, and a laser module ...