US Patent Issued to SAMSUNG ELECTRONICS on July 1 for "Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same" (South Korean Inventors)

ALEXANDRIA, Va., July 3 -- United States Patent no. 12,345,521, issued on July 1, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same" was invented by Jin Yong Kim (Seoul, South Korea), Dae Hoon Han (Hwaseong-si, South Korea), Wook Rae Kim (Suwon-si, South Korea), Myung Jun Lee (Seongnam-si, South Korea), Gwang Sik Park (Hwaseong-si, South Korea) and Sung Ho Jang (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical measurement apparatus includes a light source unit generating and outputting light, a polarized light generating unit gene...