ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,177, issued on Jan. 27, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"Plasma diagnostic circuit including variable amplification unit and method of operating the same" was invented by Juhyun Kim (Suwon-si, South Korea), Haewook Park (Suwon-si, South Korea) and Younsok Choi (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma diagnostic circuit includes a signal generator that outputs a first alternating current (AC) signal to a first reference node, a variable diagnostic circuit that includes a default electronic element connected between the first reference node and a measurement node and floated o...