ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,176, issued on Jan. 27, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-do, South Korea).
"Plasma diagnostic apparatus and operating method thereof" was invented by Haewook Park (Suwon-si, South Korea), Juhyun Kim (Suwon-si, South Korea) and Younsok Choi (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wi...