US Patent Issued to SAMSUNG ELECTRONICS on Dec. 9 for "Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,352, issued on Dec. 9, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the same" was invented by Kuihyun Yoon (Yongin-si, South Korea), Sang Ki Nam (Seongnam-si, South Korea), Kwonsang Seo (Suwon-si, South Korea), Sungho Jang (Hwaseong-si, South Korea), Jungmin Ko (Seoul, South Korea), Nam Kyun Kim (Pyeongtaek-si, South Korea), Tae-Hyun Kim (Suwon-si, South Korea), Seunghan Baek (Busan, South Korea), Seungbin Ahn (Incheon, South Korea), Jungmo Yang (Pyeongtaek-si, South Korea), Changheon Lee (Seongnam-si, South Korea) and...