ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,510,491, issued on Dec. 30, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Gyeonggi-Do, South Korea).
"Apparatus for inspecting surface of object" was invented by Yasuhiro Hidaka (Kanagawa, Japan) and Ingi Kim (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "In semiconductor inspection using second-harmonic generation within an object, a weak second-harmonic is detected at high sensitivity. In a semiconductor inspecting apparatus which irradiates a pulsed laser with a very short pulse width to a surface of a semiconductor device as the object, and measures the second-harmonic generated within the semiconductor device, a second-harmon...