ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,532, issued on Dec. 2, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (Suwon-si, South Korea).
"EUV collector inspection apparatus and inspection method" was invented by Jongbin Park (Gangneung-si, South Korea), Jeonggil Kim (Hwaseong-si, South Korea), Matsuda Yozo (Suwon-si, South Korea), Donghyub Lee (Hwaseong-si, South Korea), Dohyun Jung (Suwon-si, South Korea), Yoojin Jeong (Suwon-si, South Korea), Eunhee Jeang (Hwaseong-si, South Korea), Wondon Joo (Seoul, South Korea) and Minseok Choi (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An extreme ultraviolet (EUV) collector inspection apparatus includes a light blocking cove...