ALEXANDRIA, Va., June 9 -- United States Patent no. 12,286,707, issued on April 29, was assigned to SAMSUNG ELECTRONICS Co. Ltd. (South Korea).
"Apparatus for manufacturing semiconductor device" was invented by Joonmyoung Lee (Gwacheon-si, South Korea), Whankyun Kim (Seoul, South Korea), Jeongheon Park (Hwaseong-si, South Korea) and Junho Jeong (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for manufacturing a semiconductor device includes first and second process chambers in a first row in a first direction, third and fourth process chambers in a second row in the first direction, the third and fourth process chambers being spaced apart from the first and second proces...