US Patent Issued to SAMSUNG ELECTRONICS on April 22 for "Semiconductor deposition monitoring device" (South Korean Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,497, issued on April 22, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea).

"Semiconductor deposition monitoring device" was invented by Young Uk Choi (Seoul, South Korea), Yeon Tae Kim (Suwon-si, South Korea), Tae Soon Park (Hwaseong-si, South Korea), Kee Soo Park (Hwaseong-si, South Korea), Sung-Gyu Park (Yongin-si, South Korea), Kwang-Hyun Yang (Suwon-si, South Korea) and Seung Hun Lee (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a semiconductor deposition monitoring device comprising a supporting table, a chamber, a lamp, an optical sensor, a conduit, a plurality of se...