US Patent Issued to SAMSUNG ELECTRONICS, SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION on May 20 for "Method of detecting measurement error of SEM equipment and method of aligning SEM equipment" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,307,651, issued on May 20, was assigned to SAMSUNG ELECTRONICS Co. LTD. (South Korea) and SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION (South Korea).

"Method of detecting measurement error of SEM equipment and method of aligning SEM equipment" was invented by Nohong Kwak (Seoul, South Korea), Donyun Kim (Seoul, South Korea), Yunhyoung Nam (Seoul, South Korea), Mincheol Kang (Hwaseong-si, South Korea) and Kihyun Kim (Seongnam-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "There are provided a method of accurately detecting a measurement error of SEM equipment by comparing and aligning a design image with an SEM image, and a method of accurat...