US Patent Issued to SAMSUNG ELECTRONICS, SEMES on July 29 for "Cleaning device and method of substrate transfer device" (South Korean Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,370,580, issued on July 29, was assigned to SAMSUNG ELECTRONICS Co. LTD. (South Korea) and SEMES Co. LTD. (South Korea).

"Cleaning device and method of substrate transfer device" was invented by Min Soo Park (Yongin-si, South Korea), Ji Hun Kim (Uiwang-si, South Korea), Gyeong Dam Baek (Hwaseong-si, South Korea), Min-Gu Chang (Seoul, South Korea), Tae Hyun Jo (Cheonan-si, South Korea), Ji Yoon Jung (Ansan-si, South Korea), Su Hyun Kim (Seoul, South Korea), Hyun Gyu Roh (Seoul, South Korea), Se Woong Ahn (Cheonan-si, South Korea), Goen Hui Kim (Daejeon, South Korea) and Hyo Joo Jeoun (Hwaseong-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office:...