US Patent Issued to SAMSUNG ELECTRONICS, AUROS Technology on Nov. 18 for "Device and method for overlay measurement which control focus movement" (South Korean Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,644, issued on Nov. 18, was assigned to SAMSUNG ELECTRONICS Co. LTD. (Suwon-si, South Korea) and AUROS Technology Inc. (Hwaseong-si, South Korea).

"Device and method for overlay measurement which control focus movement" was invented by Jun Yeob Kim (Suwon-si, South Korea), Woo Yong Lim (Suwon-si, South Korea) and Ji Yun Jung (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An overlay measurement device includes a light source configured to direct an illumination to an overlay measurement target in which a first overlay key in a first layer and a second overlay key in a second layer are positioned, the second layer being stacked on ...