ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,561, issued on Nov. 4, was assigned to SAMSUNG DISPLAY Co. LTD. (Gyeonggi-Do, South Korea).
"Electrostatic chuck" was invented by Hyunjun Lee (Yongin-si, South Korea), Jinwook Kim (Yongin-si, South Korea), Hyoseung Kim (Yongin-si, South Korea), Sangil Nam (Yongin-si, South Korea) and Jaegu Ji (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An embodiment provides an electrostatic chuck including: an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed; an outer area around the adsorption area; and a detection pattern disposed in the outer area and surrounding at least a portion of the adso...