ALEXANDRIA, Va., July 9 -- United States Patent no. 12,354,903, issued on July 8, was assigned to SAMSUNG DISPLAY Co. LTD. (Gyeonggi-Do, South Korea).
"Deposition apparatus and display panel manufacturing apparatus including the same" was invented by Gyungmin Baek (Yongin-si, South Korea), Hyunah Sung (Suwon-si, South Korea), Hyuneok Shin (Gwacheon-si, South Korea), Namwook Kang (Hwaseong-si, South Korea), Dooseon Yu (Cheonan-si, South Korea) and You Jong Lee (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A deposition apparatus includes: a susceptor provided with a plurality of susceptor holes defined therein; an electrostatic chuck disposed on the susceptor and provided with a plurality ...