US Patent Issued to SAMSUNG DISPLAY, ULVAC on April 29 for "Vacuum processing apparatus and vacuum processing method using the same" (South Korean, Japanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,709, issued on April 29, was assigned to SAMSUNG DISPLAY Co. LTD. (Yongin-si, South Korea) and ULVAC INC. (Chigasaki, Japan).

"Vacuum processing apparatus and vacuum processing method using the same" was invented by Kyung Hoon Chung (Seongnam-si, South Korea), Masao Nishiguchi (Chigasaki, Japan), Daisuke Iwase (Chigasaki, Japan), Ki Jun Roh (Cheonan-si, South Korea) and Man Soo Jang (Anyang-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A vacuum processing apparatus including: a plurality of transport chambers arranged in order along a first direction; a plurality of process chambers connected to the transport chambers along a second ...