ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,228,527, issued on Feb. 18, was assigned to SAKI Corp. (Tokyo).
"Inspection device" was invented by Hiroyuki Murata (Tokyo), Atsushi Kitabatake (Tokyo) and Yuichiro Yoshida (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "To provide an inspection device capable of imaging a transmission image while changing relative positions of a radiation source, an inspection object, and a detector. An inspection device comprises a radiation generator, a substrate holding unit for holding an inspection object, a detector, a substrate holding unit driving unit and a detector driving unit, a substrate position detection unit and a detector position detection unit,...