ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,441,605, issued on Oct. 14, was assigned to ROHM Co. LTD. (Kyoto, Japan).
"MEMS module and method of manufacturing mems module" was invented by Toru Higuchi (Kyoto, Japan) and Kosuke Yamashiro (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS module includes: a first MEMS element and a second MEMS element each including a movable portion which is a portion of a substrate including a hollow portion formed therein, the movable portion configured to warp in shape according to an air pressure difference between an internal air pressure inside the hollow portion and an external air pressure outside the hollow portion; and an electronic comp...