ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,466,724, issued on Nov. 11, was assigned to ROHM Co. LTD. (Kyoto, Japan).
"MEMS mirror and MEMS mirror array system" was invented by Takashi Naiki (Kyoto, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a MEMS mirror including a flat plate that is displaceable in a film thickness direction, a frame part that is separated from the flat plate and surrounds the flat plate, a support part that connects the flat plate and the frame part and is smaller in film thickness than the frame part, and a piezoelectric body for control that is arranged on the support part. A control voltage is applied to the piezoelectric body for control to deform t...