US Patent Issued to ROHM on June 10 for "Piezoelectric element, method of manufacturing the same, surface acoustic wave element, and piezoelectric thin film resonance element" (Japanese Inventors)

ALEXANDRIA, Va., June 18 -- United States Patent no. 12,328,108, issued on June 10, was assigned to ROHM Co. LTD. (Kyoto, Japan).

"Piezoelectric element, method of manufacturing the same, surface acoustic wave element, and piezoelectric thin film resonance element" was invented by Noriyuki Shimoji (Kyoto, Japan), Tomohiro Date (Kyoto, Japan) and Norikazu Ito (Kyoto, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A piezoelectric element includes a single crystal piezoelectric film, wherein the single crystal piezoelectric film includes an aluminum nitride film and wherein a full width at half maximum at (002) diffraction peak of the aluminum nitride film is smaller than 1.00 degree."

The patent was fil...