ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,528,694, issued on Jan. 20, was assigned to Robert Bosch GmbH (Stuttgart, Germany).
"Microelectromechanical system and method for manufacturing a microelectromechanical system" was invented by Rolf Scheben (Reutlingen, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A microelectromechanical system, including a substrate having a major plane of extension. The microelectromechanical system includes a mass structure. The mass structure is formed to be movable relative to the substrate in a vertical direction, perpendicularly to the major plane of extension. The mass structure includes an electrode structure. The substrate includes a counter-electrod...