US Patent Issued to ROBERT BOSCH on Feb. 18 for "Method for manufacturing a MEMS switch having an embedded metal contact" (German Inventors)

ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,457, issued on Feb. 18, was assigned to ROBERT BOSCH GMBH (Stuttgart, Germany).

"Method for manufacturing a MEMS switch having an embedded metal contact" was invented by Jochen Reinmuth (Reutlingen, Germany), Matthew Lewis (Reutlingen, Germany) and Peter Schmollngruber (Aidlingen, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS switch that includes a substrate with a first insulating layer and a silicon layer thereabove, a fixed portion and a movable switching portion being formed in the silicon layer.A first metal layer is situated in recesses in the silicon layer at a side of the silicon layer facing away from the substrate, the firs...