ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,448,567, issued on Oct. 21, was assigned to Resonac Corp. (Tokyo).
"Method for removing metal compound" was invented by Kazuma Matsui (Tokyo).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for removing a metal compound capable of selectively removing an oxide of a metal, a nitride of a metal, or an oxynitride of a metal while suppressing the removal of silicon dioxide, silicon nitride, polysilicon, a simple substance of a metal, or the like. The method includes bringing at least one metal compound selected from oxides of a metal, nitrides of a metal, and oxynitrides of a metal into contact with a treatment liquid to remove it from a treatment ob...