ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,109, issued on May 20, was assigned to Resonac Corp. (Tokyo).
"Inspection condition presentation apparatus, surface inspection apparatus, inspection condition presentation method and program" was invented by Katsuhisa Yoshida (Tokyo), Yoshishige Okuno (Tokyo), Shuji Hatada (Chiba, Japan) and Kazunori Ohashi (Chiba, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "An inspection condition presentation apparatus includes an intensity calculation part configured to calculate an intensity distribution of scattered light when inspection light is irradiated on a surface of an inspection target on which scatterers of different types are present accordin...