US Patent Issued to Raytheon on June 17 for "Multi-layer resonator assembly and method for fabricating same" (Massachusetts Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,906, issued on June 17, was assigned to Raytheon Co. (Waltham, Mass.).

"Multi-layer resonator assembly and method for fabricating same" was invented by Lovelace Soirez (Andover, Mass.) and Jeffrey R. LaRoche (Andover, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method for fabricating a multi-layer resonator assembly includes sequentially fabricating a plurality of vertically-stacked resonator layers including, for each resonator layer of the plurality of resonator layers, depositing a dielectric layer, forming at least one film bulk acoustic resonator (FBAR) cavity in the deposited dielectric layer, filling each FBAR cavity of the at leas...