ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,399,321, issued on Aug. 26, was assigned to POET Technologies Inc. (Petaluma, Calif.).
"Optical dielectric planar waveguide process" was invented by William Ring (High Bridge, N.J.), Miroslaw Florjanczyk (Kanata, Canada) and Suresh Venkatesan (Los Gatos, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for depositing silicon oxynitride film structures is provided that is used to form planar waveguides. These film structures are deposited on substrates and the combination of the substrate and the planar waveguide is used in the formation of optical interposers and subassemblies. The silicon oxynitride film structures are deposited using low...