US Patent Issued to PNC PROCESS SYSTEMS, ULTRON SEMICONDUCTOR (SHANGHAI) on July 29 for "Method of controlling mixed liquid to be delivered for SPM solution" (Chinese Inventors)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,372,988, issued on July 29, was assigned to PNC PROCESS SYSTEMS Co. LTD. (Shanghai) and ULTRON SEMICONDUCTOR (SHANGHAI) Co. LTD. (Shanghai).

"Method of controlling mixed liquid to be delivered for SPM solution" was invented by Yuan Jiang (Shanghai), Dawei Liu (Shanghai), Jing Zhang (Shanghai), Zhengkai Lu (Shanghai), Ming Xu (Shanghai), Panpan Li (Shanghai), Fangyi Lv (Shanghai) and Chuanlong Liu (Shanghai).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of controlling mixed liquid to be delivered for SPM solution includes: before the SPM solution comes into an acid scouring tank, mixing the sulfuric acid with the hydrogen peroxide in a deliverin...