ALEXANDRIA, Va., June 18 -- United States Patent no. 12,327,748, issued on June 10, was assigned to Piotech Inc. (Shenyang, China).
"Semiconductor processing apparatus and method" was invented by Zhuo Wang (Shenyang, China) and Saiqian Zhang (Shenyang, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "This application relates to a semiconductor processing apparatus and method. In an embodiment of this application, the semiconductor processing apparatus includes: a wafer pocket provided with a lower electrode, where the lower electrode is coupled to a direct-current power supply; and an upper electrode disposed opposite to the wafer pocket, where the upper electrode is coupled to a radio frequency generato...