ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,460,297, issued on Nov. 4, was assigned to Picosun Oy (Espoo, Finland).
"ALD apparatus, method and valve" was invented by Marko Pudas (Masala, Finland).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus, a method and a valve with a reactive chemical inlet, a reaction chamber outlet, and a closure having an open and closed configuration to open and close, respectively, a route from the reactive chemical inlet to the reaction chamber outlet, the valve further including an additional cleaning chemical inlet at a downstream side of the closure to purge the closure."
The patent was filed on Aug. 9, 2023, under Application No. 18/446,984.
*For furthe...