ALEXANDRIA, Va., July 9 -- United States Patent no. 12,351,915, issued on July 8, was assigned to Picosun Oy (Espoo, Finland).
"Porous inlet" was invented by Marko Pudas (Masala, Finland) and Juhana Kostamo (Masala, Finland).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus including a reaction chamber with an inlet opening, an in-feed line to provide a reactive chemical into the reaction chamber via the inlet opening, incoming gas flow control means in the in-feed line, the in-feed line extending from the flow control means to the reaction chamber, the in-feed line in this portion between the flow control means and the reaction chamber having the form of an inlet pipe with a gas...