US Patent Issued to OBSIDIAN SENSORS on Jan. 13 for "MEMS and NEMS structures" (California Inventors)

ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,522,498, issued on Jan. 13, was assigned to OBSIDIAN SENSORS INC. (San Diego).

"MEMS and NEMS structures" was invented by John Hong (La Jolla, Calif.), Tallis Chang (La Jolla, Calif.), Edward Chan (La Jolla, Calif.), Bing Wen (La Jolla, Calif.), Yaoling Pan (La Jolla, Calif.) and Sean Andrews (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electromechanical systems structure including: providing a stack, including a structural layer extending in a plane, a sidewall layer including a first portion lying in a plane parallel to the structural layer plane and a second portion lying in a plane transverse to the structural layer plane, an etch-st...