ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,531,209, issued on Jan. 20, was assigned to NYSE Star Corp. (Wilmington, Del.).
"Plasma chamber having swirl motion side gas feed" was invented by Nam Hun Kim (Yeoju-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma chamber includes: a housing having a seating part on which a wafer is seated; a first swirl motion side gas feed that is provided on the side surface of the housing and injects gas into the housing; and a second swirl motion side gas feed that is provided on the side surface of the housing and injects gas into the housing, wherein the first swirl motion side gas feed and the second swirl motion side gas feed inject gas ...