US Patent Issued to NuFlare Technology on Sept. 9 for "Multi-charged particle beam writing apparatus and multi-charged particle beam writing method" (Japanese Inventors)

ALEXANDRIA, Va., Sept. 10 -- United States Patent no. 12,412,730, issued on Sept. 9, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multi-charged particle beam writing apparatus and multi-charged particle beam writing method" was invented by Yasuo Kato (Yokohama, Japan) and Ryoh Kawana (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-charged particle beam writing apparatus includes a circuit to allocate an additional dose to a position inside a writing target pattern in order to change a first dose distribution by an excessive dose, generated on the target object by applying, in the multi-charged particle beams, an excessive dose defective beam, to a second dose distributi...