ALEXANDRIA, Va., Sept. 23 -- United States Patent no. D1,094,324, issued on Sept. 23, was assigned to NuFlare Technology Inc. (Kanagawa, Japan).
"Semiconductor wafer heater" was invented by Kunihiko Suzuki (Shizuoka, Japan) and Takuto Umetsu (Kamakura, Japan).
The patent was filed on May 17, 2024, under Application No. D/942,788.
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