US Patent Issued to NuFlare Technology on Sept. 16 for "Multi-electron beam writing apparatus and multi-electron beam writing method" (Japanese Inventor)

ALEXANDRIA, Va., Sept. 17 -- United States Patent no. 12,417,896, issued on Sept. 16, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multi-electron beam writing apparatus and multi-electron beam writing method" was invented by Kota Iwasaki (Atsugi, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-electron beam writing apparatus includes a light source array to include plural light sources and generate plural first lights, a multi-lens array to include plural first lenses, and to divide the plural first lights into plural second lights by that each of the plural first lights illuminates a corresponding lens set of plural lens sets each composed of plural second lenses being a portion ...