US Patent Issued to NuFlare Technology on Nov. 25 for "Multiple charged particle beam writing apparatus, multiple charged particle beam writing method, and computer readable recording media storing program" (Japanese Inventor)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,630, issued on Nov. 25, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multiple charged particle beam writing apparatus, multiple charged particle beam writing method, and computer readable recording media storing program" was invented by Haruyuki Nomura (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "The disclosure relates to a multiple charged particle beam writing apparatus that includes a dose representative value calculator that determines a representative dose for each mesh region irradiated by multiple beams. A calculation processor computes the temperature rise in a mesh region of interest due to beam irradiation...