US Patent Issued to NuFlare Technology on June 24 for "Multiple secondary electron beam alignment method, multiple secondary electron beam alignment apparatus, and electron beam inspection apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,339,241, issued on June 24, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multiple secondary electron beam alignment method, multiple secondary electron beam alignment apparatus, and electron beam inspection apparatus" was invented by Koichi Ishii (Kawasaki, Japan) and Atsushi Ando (Edogawa-ku, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multiple secondary electron beam alignment method includes scanning a plurality of first detection elements of a multi-detector, which are arrayed in a grid, with multiple secondary electron beams emitted from a surface of a target object on a stage, detecting a plurality of beams including a co...