ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,538,756, issued on Jan. 27, was assigned to NuFlare Technology Inc. (Kanagawa, Japan).
"Vapor phase growth apparatus and reflector" was invented by Masayuki Tsukui (Yokohama, Japan), Yasushi Iyechika (Matsudo, Japan), Kiyotaka Miyano (Tokyo) and Yoshitaka Ishikawa (Yokohama, Japan).
According to the abstract* released by the U.S. Patent & Trademark Office: "A vapor phase growth apparatus of embodiments includes: a reactor; a holder provided in the reactor to place a substrate thereon; an annular out-heater provided below the holder; an in-heater provided below the out-heater; a disk-shaped upper reflector provided below the in-heater and formed of pyrolytic graphite; and a disk-shape...