US Patent Issued to NuFlare Technology on Jan. 27 for "Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method" (Japanese Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,537,163, issued on Jan. 27, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method" was invented by Yasuo Kato (Yokohama, Japan), Ryoh Kawana (Yokohama, Japan) and Masao Hayami (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multi-charged particle beam writing apparatus includes a beam forming mechanism to form multi-charged-particle-beams, a block region forming circuit to form plural block regions from an irradiation region of the multi-charged-particle-beams formed by combining plural sub-regions each surrounded by a beam, being differ...