US Patent Issued to NuFlare Technology on Feb. 3 for "Inspection apparatus and reference image generation method" (Japanese Inventor)

ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,541,838, issued on Feb. 3, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Inspection apparatus and reference image generation method" was invented by Shinji Sugihara (Tokyo).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to embodiments, an inspection apparatus includes an imaging mechanism, an image acquisition circuit that extracts an outline from image data of a sample, a development circuit that generates a developed image, an outline data generation circuit that generates data of an outline point of a pattern of the developed image, an area calculation circuit that calculates an area of a region not included in the pattern in a ...