US Patent Issued to NuFlare Technology on Dec. 30 for "Multiple charged particle beam writing method and multiple charged particle beam writing apparatus" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,297, issued on Dec. 30, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multiple charged particle beam writing method and multiple charged particle beam writing apparatus" was invented by Hiroshi Matsumoto (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multiple charged particle beam writing method according to one aspect of the present invention includes performing writing, during writing in the k-th (k being an integer of at least one) stripe region, in the k-th extended region, which is obtained by extending the irradiation region in the first direction by a predetermined extension width, while deflecting multiple ch...