US Patent Issued to NuFlare Technology on April 29 for "Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus" (Japanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,666, issued on April 29, was assigned to NuFlare Technology Inc. (Yokohama, Japan).

"Multiple electron beam image acquisition method, multiple electron beam image acquisition apparatus, and multiple electron beam inspection apparatus" was invented by Koichi Ishii (Kawasaki, Japan) and Chosaku Noda (Yokohama, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A multiple electron beam image acquisition method includes performing scanning with a representative secondary electron beam emitted, based on temporary secondary electron beam deflection conditions, for each of plural positions in a primary electron beam deflection range of a representative pr...