US Patent Issued to Novellus Systems on Oct. 14 for "Tungsten feature fill with nucleation inhibition" (California Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,651, issued on Oct. 14, was assigned to Novellus Systems Inc. (Fremont, Calif.).

"Tungsten feature fill with nucleation inhibition" was invented by Anand Chandrashekar (Fremont, Calif.), Esther Jeng (Los Altos, Calif.), Raashina Humayun (Los Altos, Calif.), Michal Danek (Cupertino, Calif.), Juwen Gao (San Jose, Calif.) and Deqi Wang (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Described herein are methods of filling features with tungsten, and related systems and apparatus, involving inhibition of tungsten nucleation. In some embodiments, the methods involve selective inhibition along a feature profile. Methods of selectively inh...