ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,385,138, issued on Aug. 12, was assigned to Novellus Systems Inc. (Fremont, Calif.).
"Plasma-enhanced deposition of film stacks" was invented by Jason Dirk Haverkamp (Tualatin, Ore.), Pramod Subramonium (Beaverton, Ore.), Joseph L. Womack (Tigard, Ore.), Dong Niu (West Linn, Ore.), Keith Fox (Tigard, Ore.), John B. Alexy (West Linn, Ore.), Patrick G. Breiling (Tigard, Ore.), Jennifer L. Petraglia (Lake Oswego, Ore.), Mandyam A. Sriram (San Jose, Calif.), George Andrew Antonelli (Portland, Ore.) and Bart J. van Schravendijk (Palo Alto, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method of depositing a film stack including films of different c...