ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,869, issued on Nov. 11, was assigned to NOVA LTD. (Rehovot, Israel).
"Raman spectroscopy based measurement system" was invented by Yonatan Oren (Kiryat Ono, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method and system are presented for use in measuring one or more characteristics of patterned structures. The method comprises: performing measurements on a patterned structure by illuminating the structure with exciting light to cause Raman scattering of one or more excited regions of the pattern structure, while applying a controlled change of at least temperature condition of the patterned structure, and detecting the Raman scattering, a...