ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,467,879, issued on Nov. 11, was assigned to NOVA LTD. (Rehovot, Israel).
"Optical phase measurement method and system" was invented by Gilad Barak (Rehovot, Israel), Danny Grossman (Herzliya, Israel), Dror Shafir (Kiryat Ono, Israel), Yoav Berlatzky (Kibbutz Beit Guvrin, Israel) and Yanir Hainick (Tel-Aviv, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A measurement system for use in measuring parameters of a patterned sample, the system including a broadband light source, an optical system configured as an interferometric system, a detection unit, and a control unit, where the interferometric system defines illumination and detection channels h...