ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,332, issued on Dec. 16, was assigned to NOVA LTD. (Rehovot, Israel).
"Imaging metrology" was invented by Igor Turovets (Rehovot, Israel), Shimon Yalov (Rehovot, Israel), Alex Shichtman (Rehovot, Israel), Misha Matusovsky (Rehovot, Israel) and Shachar Paz (Rehovot, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for optical metrology of a sample, the method may include illuminating areas of the sample by sets of pulses of different wavelengths, during a movement of a variable speed of the sample; collecting light reflected from the sample, as a result of the illuminating, to provide sets of frames, each set of frames comprises partiall...