US Patent Issued to NITERRA on Dec. 30 for "YAG sintered body, method for producing the same, semiconductor manufacturing equipment member, and gas nozzle" (Japanese Inventor)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,509,355, issued on Dec. 30, was assigned to NITERRA Co. LTD. (Nagoya, Japan).

"YAG sintered body, method for producing the same, semiconductor manufacturing equipment member, and gas nozzle" was invented by Atsushi Tsuchida (Nagoya, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A YAG sintered body has a predetermined surface where intragranular pores are exposed. On the predetermined surface, arithmetic average roughness Ra satisfies Raless than equal to0.5 micro metre, and a ratio between maximum height Rz and maximum valley depth Rv satisfies Rv/Rzless than equal to0.7. With this configuration, the predetermined surface of a processed surface i...