US Patent Issued to NISSHINBO MICRO DEVICES on Nov. 11 for "MEMS element and method of manufacturing the same" (Japanese Inventors)

ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,470,877, issued on Nov. 11, was assigned to NISSHINBO MICRO DEVICES INC. (Tokyo).

"MEMS element and method of manufacturing the same" was invented by Takao Fukutome (Fujimino, Japan) and Yoshimitsu Karasawa (Fujimino, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "A MEMS element comprises a substrate 1 with an opening 1a, a vibrating membrane 3 formed on the substrate 1 through an insulating film 2, and a backplate 5 fixed to a spacer 4 on the substrate 1. The vibrating membrane 3 has intermittent slits 3a along its edge 3d. The backplate 5 has acoustic holes 5b in the center, and etching holes 5c in the periphery thereof and closer to the edge si...