US Patent Issued to NIPPON CONTROL SYSTEM on Oct. 7 for "Mask information adjusting apparatus, mask data adjusting method, and program" (Japanese Inventors)

ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,436,455, issued on Oct. 7, was assigned to NIPPON CONTROL SYSTEM Corp. (Tokyo).

"Mask information adjusting apparatus, mask data adjusting method, and program" was invented by Dai Tsunoda (Kanagawa, Japan) and Yasuaki Horima (Kanagawa, Japan).

According to the abstract* released by the U.S. Patent & Trademark Office: "In order to solve a problem of conventional mask information adjusting apparatuses in which the data size of mask information that can produce precise exposure patterns is large, an mask information adjusting apparatus includes: a subject information acquiring unit that acquires pre-adjustment mask information containing a polygonal mask pattern; a processing unit that a...